High‑NA EUV's reduced field size is driving new innovation in optical proximity correction and mask synthesis.

YOKOHAMA—After a decade of development, Canon Inc. began selling lithography equipment for semiconductor production, hoping to reclaim a share in the market. The equipment is used to print fine ...

From its origins more than 200 years ago as an efficient way to publish theatrical works, lithographic printing has grown to be the preferred method for a vast range of print projects. Currently, the ...

Soft lithography facilitates the fabrication of intricate three-dimensional patterns and structures at both microscale and nanoscale dimensions. Diverging from photolithography, a technique commonly ...

Simply sign up to the Life & Arts myFT Digest -- delivered directly to your inbox. One day in 1796, a 25-year-old Bavarian playwright named Aloys Senefelder was in his workshop polishing a limestone ...