MOCVD - SlideServe
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MOCVD - SlideServe
MOCVD. Growths are performed at room pressure or low pressure (10 mtorr-100 torr) Wafers may rotate or be placed at a slant to the direction of gas flow Inductive heating (RF coil) or conductive heating Reactants are gases carried by N 2 or H 2 into chamber
Aug 26, 2014
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